Title:
Gas cell
Document Type and Number:
Japanese Patent JP6094571
Kind Code:
B2
Inventors:
Kimio Nagasaka
Application Number:
JP2014261916A
Publication Date:
March 15, 2017
Filing Date:
December 25, 2014
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01R33/26; G01J4/04; G01R33/032
Domestic Patent References:
JP50003291A | ||||
JP50098770A | ||||
JP2010085134A | ||||
JP3155023A | ||||
JP1311539A | ||||
JP2230654A | ||||
JP2010205875A | ||||
JP2009283526A |
Foreign References:
US3904260 |
Attorney, Agent or Firm:
Kazuaki Watanabe
Keisuke Nishida
Satoshi Nakai
Keisuke Nishida
Satoshi Nakai