Title:
GAS-CIRCULATING SYSTEM, CIRCULATING METHOD OF GAS AND LITHOGRAPHY EQUIPMENT
Document Type and Number:
Japanese Patent JPH10135132
Kind Code:
A
Abstract:
To provide a gas-circulating system and a gas-circulating method which can maintain the temperature of gas along an interferometer beam to be constant.
This gas-circulating system is used together with a positioning equipment in a housing which has a movable object 12 positioned in the housing. A first gas source 86 of the gas which flows intersecting the movable object 12 via the housing, and a second gas source 54 of the gas which flows toward the movable object 12, when the object 12 is at least in the central part of the housing are installed. The second gas source 54 makes the gas flow, so as to intersect each of the light beams of an interferometer as a positioning equipment.
Inventors:
SOGARD MICHAEL R
EATON JOHN K
SUWA KYOICHI
KOBAYASHI NAOYUKI
EATON JOHN K
SUWA KYOICHI
KOBAYASHI NAOYUKI
Application Number:
JP29084497A
Publication Date:
May 22, 1998
Filing Date:
October 23, 1997
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L21/027; G03F7/20; G03F7/207; (IPC1-7): H01L21/027
Attorney, Agent or Firm:
Kazuo Shamoto (5 outside)
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