Title:
GAS CIRCULATION FAN OF EXCIMER LASER DEVICE
Document Type and Number:
Japanese Patent JP2003056489
Kind Code:
A
Abstract:
To provide a gas circulation fan of an excimer laser device allowing a machine body unit and a controller to be completely compatible with each other.
Relays 15 and 16 are installed between magnetic bearings 41 and 42 supporting a spindle 1 in the state of non-contact with each other and a controller 7, and position detection sensor circuits 151 and 161, offset adjusters 152 and 162, feedback gain adjusters 153 and 163, and filter circuits 154 and 164 are incorporated in the relays 15 and 16. Thus the machine body unit 25 is formed compatible with the controller 7.
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Inventors:
YADA YUJI
Application Number:
JP2001250596A
Publication Date:
February 26, 2003
Filing Date:
August 21, 2001
Export Citation:
Assignee:
NTN TOYO BEARING CO LTD
International Classes:
F04D29/056; F04D29/00; F04D29/04; F04D29/05; F04D29/058; F16C32/04; F16C39/06; H01S3/036; H01S3/225; (IPC1-7): F04D29/04; F04D29/00; F16C32/04; H01S3/036; H01S3/225
Attorney, Agent or Firm:
Fukami Hisaro (3 outside)