Title:
GAS CONCENTRATION CALIBRATION METHOD AND CALIBRATION IMPLEMENT APPLIED TO MASS-SPECTROMETER-TYPE GAS LEAK DETECTOR
Document Type and Number:
Japanese Patent JP2625342
Kind Code:
B2
Abstract:
PURPOSE: To furnish a gas concentration calibration method and a calibration implement for a gas leak detector which are highly sensitive and highly precise and also excellent in reliability, operability and maintainability, as a gas leak inspection method substituted for a gas inspection method using a freon gas.
CONSTITUTION: A gas concentration calibration method applied to a gas- spectrometer-type gas leak detector having a gas sampling part 12, a vacuum exhaust part and a mass spectrometer part, wherein gas concentration calibration is executed by making a standard gas circulate through a closed pipeline composed of a gas collecting implement 8, a gas introduction selector valve 6, a gas sampling pump 7 and a minute leak mechanism part 1 for the mass spectrometer part by a gas introduction selecting mechanism. A gas concentration calibration implement applied to the mass-spectrometer-type gas leak detector, which is equipped with a gas circulating mechanism composed of the gas introduction selecting mechanism, the gas collecting implement of a fixed capacity, the gas sampling pump 7 and the minute leak mechanism part 1 for the mass spectrometer part 5.
Inventors:
Koichi Fujiwara
Hiroki Kuwano
Hiroki Kuwano
Application Number:
JP68893A
Publication Date:
July 02, 1997
Filing Date:
January 06, 1993
Export Citation:
Assignee:
Nippon Telegraph and Telephone Corporation
International Classes:
G01M3/22; G01M3/02; G01M3/04; G01N27/62; (IPC1-7): G01N27/62; G01M3/22
Domestic Patent References:
| JP59145943A | ||||
| JP3296659A | ||||
| JP5426987U |
Attorney, Agent or Firm:
Takehiko Suzue
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