Title:
気体制御装置
Document Type and Number:
Japanese Patent JP5776793
Kind Code:
B2
Abstract:
A gas control apparatus includes an upper housing to which a second piezoelectric pump is joined, a lower housing to which a first piezoelectric pump is joined, and a diaphragm. The upper housing includes a discharge hole through which gas is discharged. The lower housing includes introduction holes through which gas is introduced, an opening, a first valve seat, a second valve seat, and a third valve seat. The diaphragm is sandwiched between the upper housing and the lower housing, and is fixed to the upper housing and the lower housing so that the diaphragm contacts the first valve seat, the second valve seat, and the third valve seat. The diaphragm divides an inner space of the upper housing and the lower housing to define valve chests together with the upper housing and the lower housing.
Inventors:
Kamiyadake
Atsuhiko Hirata
Atsuhiko Hirata
Application Number:
JP2013548256A
Publication Date:
September 09, 2015
Filing Date:
December 05, 2012
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
F04B41/06
Domestic Patent References:
| JP6252291U | ||||
| JP420751A |
Foreign References:
| WO2011145544A1 |
Attorney, Agent or Firm:
Kaede International Patent Office