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Title:
GAS DISSOLVED WATER SUPPLY DEVICE AND MANUFACTURING METHOD OF GAS DISSOLVED WATER
Document Type and Number:
Japanese Patent JP2015180500
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a gas dissolved water supply device capable of stably supplying gas dissolved water having low dissolved gas concentration (a low saturation degree), and to provide a manufacturing method of the gas dissolved water.SOLUTION: An oxygen gas is supplied from a gas supply pipe 31 to a gas phase chamber 13 and a vacuum pump 35 is operated to evacuate the gas phase chamber 13. Further, raw water is supplied from a raw water pipe 21 into a liquid phase chamber 12. A part of oxygen in the gas phase chamber 13 penetrates a gas transmission film 11 and dissolves in the raw water in the liquid phase chamber 12 to produce gas dissolved water. The other part of the oxygen in the gas phase chamber 13 is suctioned by the vacuum pump 35 with condensed water to be discharged from an exhaust pipe 33. Dissolved gas concentration of the gas dissolved water is measured by a dissolved gas concentration meter 23. Opening of a gas flow control valve 32 is adjusted so that the measured concentration becomes a target value.

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Inventors:
TOKOSHIMA HIROTO
SEO KEITA
Application Number:
JP2015109867A
Publication Date:
October 15, 2015
Filing Date:
May 29, 2015
Export Citation:
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Assignee:
KURITA WATER IND LTD
International Classes:
B01F1/00; B01F5/06; B01F15/04; H01L21/304
Domestic Patent References:
JP2000051606A2000-02-22
JP2005270793A2005-10-06
JPH1177023A1999-03-23
JP2009113013A2009-05-28
JP2009254935A2009-11-05
JP2009219996A2009-10-01
JP2009219997A2009-10-01
JP2010023002A2010-02-04
JP2007185559A2007-07-26
JP2000189742A2000-07-11
JP2007319843A2007-12-13
JP2003334433A2003-11-25
JP2006071340A2006-03-16
JP2009040656A2009-02-26
JPH09150009A1997-06-10
Attorney, Agent or Firm:
Tsuyoshi Shigeno
Takayuki Shigeno



 
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