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Title:
GAS DISSOLVED WATER SUPPLYING APPARATUS
Document Type and Number:
Japanese Patent JP2008066460
Kind Code:
A
Abstract:

To provide a gas dissolved water supplying apparatus which supplies gas dissolved water to be used in a wet washing process of electronic materials, etc. to a plurality of washing machines and can effectively save water when washing the electronic materials, etc.

The gas dissolved water supplying apparatus comprises a gas dissolving device 3, a buffer tank 5 for storing gas dissolved water, a water supply pipe 15 for supplying the gas dissolved water obtained by the gas dissolving device 3 to the buffer tank, supply pipes 12 and 13 which can supply the gas dissolved water stored in the buffer tank to a plurality of washing machines C1-C4, and a supply pump 9 equipped in the supply piping. In addition to the supply pipe, the buffer tank also has a discharge water channel 8a for discharging excessive gas dissolved water. The gas dissolved water obtained by the gas dissolving device is supplied to the buffer tank continuously at a predetermined rate of supply and then a necessary amount of gas dissolved water is supplied to the washing machines in operation via the supply pipe, while at the same time excessive gas dissolved water exceeding the storage capacity of the buffer tank is discharged through the discharge water channel.


Inventors:
TOKOSHIMA HIROTO
MORITA HIROSHI
Application Number:
JP2006241772A
Publication Date:
March 21, 2008
Filing Date:
September 06, 2006
Export Citation:
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Assignee:
KURITA WATER IND LTD
International Classes:
H01L21/304; B08B3/08
Domestic Patent References:
JP2000271549A2000-10-03
JP2000294532A2000-10-20
JP2005186067A2005-07-14
JP2002096030A2002-04-02
JP2001137798A2001-05-22
JPH10303164A1998-11-13
JPH06106141A1994-04-19
Foreign References:
WO2005121407A22005-12-22
Attorney, Agent or Firm:
Mitsuru Uchiyama