Title:
ガス分配装置および処理装置
Document Type and Number:
Japanese Patent JP7033950
Kind Code:
B2
Abstract:
A gas distribution device includes a plurality of supply lines, a branch unit and a variation suppression unit. The supply lines are respectively connected to a plurality of processing chambers. The branch unit is configured to distribute a gas supplied from a gas supply source to the supply lines. The variation suppression unit is provided between the branch unit and the gas supply source and configured to supply the gas from the gas supply source to the branch unit and suppress variation in flow rates of the gas distributed by the branch unit between the supply lines.
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Inventors:
Takumi Kabe
Rintaka Aida
Rintaka Aida
Application Number:
JP2018026926A
Publication Date:
March 11, 2022
Filing Date:
February 19, 2018
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/455
Domestic Patent References:
| JP2016033997A |
Foreign References:
| US20080069954 |
Attorney, Agent or Firm:
Sakai International Patent Office