GAS FEEDER IN VACUUM PUMP - TOYOTA IND CORP

Title:

GAS FEEDER IN VACUUM PUMP

Document Type and Number:

Japanese Patent JP2003120529

Kind Code:

A

Abstract:

To ensure a stable dilution effect by feeding an inert gas.

An electromagnetic flow regulating valve 67 is fitted to a base pipe 60 on the upstream side of connection parts 541-591 of the base pipe 60 which is a feed passage of the inert gas to branched pipes 54-59. The flow regulating valve 67 regulates the flow rate of the inert gas flowing in the base pipe 60. The flow regulating valve 67 receives the command control of a flow control device 68. A pressure detector 62 is signal-connected to the flow control device 68, and pressure detection information in an introduction pipe 61 obtained by the pressure detector 62 is transmitted to the flow control device 68. The flow control device 68 controls the valve opening of the flow regulating valve 67, i.e., the gas feed flow regulating condition based on the pressure detection information obtained from the pressure detector 62.

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Inventors:

YAMAMOTO SHINYA
KAWAGUCHI MASAHIRO
ISHIGURE HIROYUKI

Application Number:

JP2001318894A

Publication Date:

April 23, 2003

Filing Date:

October 17, 2001

Export Citation:

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Assignee:

TOYOTA IND CORP

International Classes:

F04C23/00; F04B37/16; F04B49/06; F04C25/02; F04C28/00; F04C28/08; F04C28/24; F04C28/28; (IPC1-7): F04B37/16; F04B49/06; F04C23/00; F04C25/02; F04C29/10

Attorney, Agent or Firm:

Hironobu Onda (1 person outside)

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