Title:
GAS FILTERING FACILITY
Document Type and Number:
Japanese Patent JPH09141027
Kind Code:
A
Abstract:
To efficiently remove ions from a circulated gas while the running cost and the initial cost are maintained low.
The filter F through which a circulated gas 3 in a clean room 1 can be filtered consists of a filter main body 12 formed into a cloth by using ion exchange fibers 11. A pair of rail members R which can independently support each end of the filter F are disposed in a fixing side of the clean room 1. The both ends of the filter F are provided with attachments 13 which can be independently attached to and detached from the rail member pair R.
Inventors:
SAKATA KUNIHIRO
NONAKA HIROSHI
SUENAGA TOSHINORI
TOKUNAGA SHINGO
HIDETOKU SUSUMU
FUJIWARA GORO
HATSUTORI SHINJI
IRIE NAOKI
NONAKA HIROSHI
SUENAGA TOSHINORI
TOKUNAGA SHINGO
HIDETOKU SUSUMU
FUJIWARA GORO
HATSUTORI SHINJI
IRIE NAOKI
Application Number:
JP30700995A
Publication Date:
June 03, 1997
Filing Date:
November 27, 1995
Export Citation:
Assignee:
KYUSHU NIPPON ELECTRIC
TAKUMA KK
TAKUMA KK
International Classes:
E04H5/02; B01D39/14; B01D46/10; B01D46/52; B01L1/04; (IPC1-7): B01D46/10; B01D39/14; B01D46/52; E04H5/02
Attorney, Agent or Firm:
Kitamura Osamu
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