PURPOSE: To provide a gas flow data storage device where the data for accurately deciding used equipments is collected and stored.
CONSTITUTION: A flowmeter 4 outputs the gas flaw rate in a tube 9, each time a unit amount passes, with flaw rate signal as one pulse. Based on each peak value of the flow rate signal, the equipment being used is assumed. Then, when flaw rate changes, the time of its occurrence is stored. If increase takes place, the values of (ARA1) and (ARA2) of the column corresponding to the increased amount are increased by one, and in the case of decrease, the value of (ARRA2) is decreased by one. Thus, fluctuation of flow rate is accurately obtained, and based on the obtained data, individual equipment is identified even when multiple equipments are used at the same time.
NAGANO YUICHI
SATO TATSURO
YOKOSUKA SATOTOMO
ITO MASAHIKO
KIMMON MFG CO LTD