Title:
ガス流の分割装置
Document Type and Number:
Japanese Patent JP3576300
Kind Code:
B2
Abstract:
An equalization chamber has a first plurality of gas inlet openings for a gas stream and a second plurality of gas outlet openings for partial gas streams, each outlet being connected by way of a gas line to a gas consumer, the maximum flow resistance for each partial gas stream being located in the area under the gas outlet openings, seen in the flow direction of the partial gas streams. To guarantee the highest possible degree of uniformity and reproducibility of the gas supply to the consumers, the maximum flow resistance for each partial gas stream is provided in the gas line between the gas outlet opening and the gas consumer.
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Inventors:
Claus Ruppert
Heinz Bauscher
Heinz Bauscher
Application Number:
JP848896A
Publication Date:
October 13, 2004
Filing Date:
January 22, 1996
Export Citation:
Assignee:
Shin-Etsu Quartz Products Co., Ltd.
International Classes:
F15B13/06; B01J4/00; C03B8/02; C03B8/04; C03B19/14; C03B37/014; C03B37/018; C23C16/455; F17D1/04; C23C16/44; (IPC1-7): C03B8/04; C03B37/018; F17D1/04
Domestic Patent References:
| JP63192439U | ||||
| JP61254242A | ||||
| JP59080325A | ||||
| JP5203099A |
Attorney, Agent or Firm:
Michiteru Soga
Michiharu Soga
Hidetoshi Furukawa
Suzuki Kenchi
Michiharu Soga
Hidetoshi Furukawa
Suzuki Kenchi