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Title:
GAS FLOW RATE SENSOR AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JPS58131572
Kind Code:
A
Abstract:

PURPOSE: To obtain a gas flow rate sensor having a simple constitution, easy production and superior detecting characteristics by applying a resistance pattern to a small piece of ceramic plate.

CONSTITUTION: A pattern 3A consisting of paste including metallic powder such as W is formed on a ceramic plate 2A by printing or the like and burnt in a non-oxidation atmosphere to divide the plate 2A in each dividing channel 5, so that a simple gas flow rate sensor 1 is formed with the simple constitution having the resistance pattern 3 on a small piece of ceramic plate 2. Consequently the sensor has small thermal capacity and high response speed and the detecting characteristics can be improved because the temperature resistance factor of the pattern 3 is increased in accordance with the selection of past.


Inventors:
MIYAZAKI MATAROU
Application Number:
JP1397682A
Publication Date:
August 05, 1983
Filing Date:
February 01, 1982
Export Citation:
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Assignee:
KYOCERA CORP
International Classes:
G01F1/68; G01F1/692; G01P5/08; (IPC1-7): G01P5/08



 
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