Title:
GAS INLET PIPE AND THIN-FILM GROWING APPARATUS
Document Type and Number:
Japanese Patent JP3498617
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a plurality of sufficient flat laminar flows, using a small quantity of raw gas flow by providing a gas inlet pipe capable of sufficiently lowering the height of openings in a plurality of gas exhaust ports and thinning a partition panel, without deformation or shift in the partition panel and a sidewall.
SOLUTION: In a gas inlet pipe 11, a plurality of gas passages 10a and 10b are laminated which extend from gas inlet ports 17a and 17b positioned at one end of a hollow body to gas exhaust ports 16a and 16b positioned at the other end of the hollow body, and a plurality of the gas passages 10a and 10b are formed as spaces surrounded and formed by a upper metallic plate 12 and a bottom metallic plate 13, a plurality of metallic sidewalls 14a and 14b placed between the upper plate 12 and the bottom plate 13, and a metallic partition plate 15 placed between the sidewalls 14a and 14b.
Inventors:
Hidemi Takeishi
Hidenori Kamei
Yasunari Oku
Hidenori Kamei
Yasunari Oku
Application Number:
JP2759499A
Publication Date:
February 16, 2004
Filing Date:
February 04, 1999
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
H01L21/205; C23C16/455; C30B25/14; C30B35/00; (IPC1-7): H01L21/205; C23C16/455; C30B25/14; C30B35/00
Domestic Patent References:
| JP8139034A | ||||
| JP7193015A | ||||
| JP5283339A | ||||
| JP5144753A | ||||
| JP529128U | ||||
| JP9508890A |
Attorney, Agent or Firm:
Fumio Iwahashi (2 others)
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