GAS INTRODUCTION PIPE CONNECTION STRUCTURE AND SUBSTRATE TREATING DEVICE USING THE SAME

Japanese Patent JP2016176584

A

PROBLEM TO BE SOLVED: To provide a gas introduction pipe connection structure which can prevent co-rotation of a retainer when fastening and fixing the retainer to a treatment container by using a screw fastening member, and to provide a substrate treatment device using the gas introduction pipe connection structure.SOLUTION: A gas introduction pipe connection structure for connecting a gas introducing pipe 100 to a prescribed gas introducing part 80 of a treatment container in order to introduce gas into the treatment container 4 includes: a gas introducing pipe-inserted member 70 which is provided on the gas introducing part and has an opening 71; a retainer which is provided on a tip of the gas introducing pipe, retains the tip of the gas introducing pipe and can be inserted to the opening of the gas introducing pipe-inserted member; and a fastening member which is provided on the surrounding of the gas introducing pipe, is inserted to the opening of the gas introducing pipe-inserted member, is screwed and fastened with the gas introducing pipe-inserted member and, thereby, can press and fix the retainer to the gas introducing part. Therein, the gas introducing pipe-inserted member and the retainer have such an engagement structure part as to be engaged with each other and prevent co-rotation with the fastening member.SELECTED DRAWING: Figure 6

ITABASHI MASARU
MIURA YOSHINORI

JP2015058965A

October 06, 2016

March 23, 2015

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TOKYO ELECTRON LTD

F16L21/08; C23C16/455; H01L21/31

JP2014152833A	2014-08-25
JPS63110787U	1988-07-16
JPH025689U	1990-01-16
JP2002009009A	2002-01-11
JP2011040636A	2011-02-24

Tadashige Ito
Tadahiko Ito

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