Title:
Gas introduction piping connection structure and thermal treatment equipment using this
Document Type and Number:
Japanese Patent JP6145279
Kind Code:
B2
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Inventors:
Mitsuru Yamazaki
Application Number:
JP2013021790A
Publication Date:
June 07, 2017
Filing Date:
February 06, 2013
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
F16L1/00; C23C16/455; F16L19/025; F16L35/00; H01L21/31
Domestic Patent References:
JP201140636A | ||||
JP2007192245A | ||||
JP2005308209A | ||||
JP200947213A | ||||
JP200281589A | ||||
JP2009236094A | ||||
JP780445A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito