Title:
GAS LASER CONSISTING OF AXIAL GAS FLOW EXCITATION TUBE
Document Type and Number:
Japanese Patent JP2554024
Kind Code:
B2
Abstract:
PURPOSE: To form a gas intake region or gas outlet reign along an excitation tube, without generating as much as possible a vortex over a wide range.
CONSTITUTION: Of a gas laser which is provided with electrodes 54a and 54i for electrically exciting gas in an excitation tube and also provided with a gas intake part and a gas outlet part at the outer periphery of the excitation tube, the gas intake part has annular split nozzles 52 which are formed between the end parts of tube main bodies 1 and 50 and a swell part 48 which connects the two tube main bodies and is provided with a gas intake tube 9. Then the swell part 48 is connected to the end parts of the tube main bodies 1 and 50 gradually, with gently curved surfaces toward the split nozzle 52, when viewed in the lengthwise section.
More Like This:
JPH0645358 | [Name of invention] Magnetic coupling drive device |
WO/1999/046836 | WAVELENGTH SYSTEM FOR AN EXCIMER LASER |
WO/2017/094459 | EXCIMER LASER DEVICE |
Inventors:
HAADEI PII UAISU
Application Number:
JP13610494A
Publication Date:
November 13, 1996
Filing Date:
June 17, 1994
Export Citation:
Assignee:
PII AARU SHII CORP
International Classes:
H01S3/036; H01S3/038; H01S3/03; H01S3/0953; H01S3/097; H01S3/0979; H01S3/07; (IPC1-7): H01S3/036; H01S3/03
Attorney, Agent or Firm:
Masatake Shiga