PURPOSE: To dispense with a mounting/demounting construction for gas sensors, wirings, or the like accompanied by carry-in/carry-out of manufacturing equipment by a method wherein first and second gas suction pipes at one end of which the gas sensor is arranged are disposed under a grating.
CONSTITUTION: First and second gas suction pipes 21 to 25, 31 to 35 extend outwardly of a clean room. Suction type gas sensors 41 to 45, 51 to 55 are respectively fitted on each end part. These gas sensors 41 to 45, 51 to 55 are electrically connected with a gas leak monitor computer 61. These are provided under a grating and then mounting/demounting operations of gas sensors to manufacturing equipment whenever the manufacturing equipment may be carried in/out can be dispensed with. However, the first gas absorption pipe 21 to 25 is arranged in five lines at specific intervals and besides the second gas suction pipe 31 to 35 is arranged in five lines perpendicularly and gas suction holes are made at specific intervals in each pipe and gas is sucked from these holes.
SHIBUYA MAMORU
OONAKAHARA SHINOBU
CHIBA ERIKO
AMAMIYA MAKOTO
TOSHIBA MICRO ELECTRONICS
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