Title:
GAS-LIQUID MIXING METHOD, GAS-LIQUID MIXING DEVICE, AND RINSING METHOD USING GAS-LIQUID MIXED FLUID CONTAINING FINE BUBBLES
Document Type and Number:
Japanese Patent JP2014069160
Kind Code:
A
Abstract:
To provide gas-liquid mixing method and a gas-liquid mixing device capable of suppressing the fusion and coalescence of bubbles produced in a gas-liquid mixed fluid, into which a gas is injected into a liquid, and efficiently generating as many fine bubbles such as micro-bubbles or nano-bubbles as possible relative to the entire quantity of the gas-liquid mixed fluid, and a rinsing method using the gas-liquid mixed fluid containing the fine bubbles.
Fine air bubbles are produced by lowering the pressure of the gas-liquid mixed fluid to a level lower than atmospheric pressure, which was prepared by injecting gases into a liquid, and then by raising the pressure of the gas-liquid mixed fluid to atmospheric pressure or higher.
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Inventors:
YASUNAGA NOZOMI
FURUKAWA SEIJI
FURUKAWA SEIJI
Application Number:
JP2012219126A
Publication Date:
April 21, 2014
Filing Date:
October 01, 2012
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
B01F3/04; B01F1/00; B08B3/10; H01L21/304
Attorney, Agent or Firm:
Michiharu Soga
Suzuki Kenchi
Kajinami order
Kazuhiro Oyaku
Shunichi Ueda
Junichiro Yoshida
Satoshi Iino
Suzuki Kenchi
Kajinami order
Kazuhiro Oyaku
Shunichi Ueda
Junichiro Yoshida
Satoshi Iino