To provide a gas measuring apparatus capable of measuring the diffusion amount of the chemical substance that diffuses from a material placed at an arbitrary temperature or in an arbitrary atmosphere.
The gas measuring apparatus is equipped with an object 12 to be measured; a first gas flowing means 1 and a second gas flowing means 2; a first gas supply means 3 and a second gas flowing means 4 both of which supply a flowing gas; a first gas purifying means 5 and a second gas purifying means 6, both of which purify the flowing gas; a first flow rate control means 7 and a second flow rate control means 8 both of which control the flow rate of the flowing gas; a first gas collecting means 9 and a second gas collecting means 10 both of which collect the gases flowing out of the first and second gas flowing means 1 and 2; and a temperature control means 11 for controlling the temperature of the object 12 to be measured, thereby collecting the diffused gas from the object 12 to be measured, when the atmosphere or temperature, the flow rate of the supplied gas, the area of the object to be measured and the like are changed.
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HIRAI CHIE
Hiroki Naito
Daisuke Nagano