PURPOSE: To produce a gas permeable membrane having superior gas permeability and gas separating performance by depositing vapor of a high molecular substance excited by passing through plasma on the surface of a porous support to a specified thickness.
CONSTITUTION: A high molecular substance 3 such as poly-2,6-dimethyl-1,4- phenylene oxide in a crucible 4 in a vacuum vessel 1 is evaporated by heating with a filament 5. The resulting vapor is excited by passing through plasma generated between a high frequency coil 7 and a substrate holder 2 and a polymer membrane is formed on the surface of a porous support fitted to the holder 2. A gas permeable membrane having superior gas permeability and gas separating performance can simply be produced.
HIROTA KOJI
NAKABO TOSHIHIRO
