GAS PRESSURE GAUGE - KOGYO GIJUTSUIN

Title:

GAS PRESSURE GAUGE

Document Type and Number:

Japanese Patent JPS6057231

Kind Code:

A

Abstract:

PURPOSE: To make a title pressure gauge small-sized, and to expand a pressure range in a friction type measurement by using a piezoelectric vibrator for executing a bend vibration of a piezoelectric substance.

CONSTITUTION: A piezoelectric vibrator A is vibrated by an AC voltage from an oscillating circuit B. In this case, an amplitude of the vibrator A corresponding to a frictional force of a gas operating on the vibrator A and a variation of its electric characteristic are detected by a measuring circuit C. This measuring output is brought to operation processing D, converted to a pressure, and supplied to a display part E. In this regard, a pressure receiving part I is formed by using as the vibrator A a prismatic bend vibrator of an XY cut.

Inventors:

HIRATA MASAHIRO
KOKUBU KIYOHIDE
ONO MASATOSHI
MURAKAMI HIROSHI
TODA YOSHITSUGU

Application Number:

JP8064483A

Publication Date:

April 03, 1985

Filing Date:

May 09, 1983

Export Citation:

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Assignee:

KOGYO GIJUTSUIN

International Classes:

G01L9/00; G01L21/22; (IPC1-7): G01L9/00; G01L21/22

Domestic Patent References:

JPS55149824A	1980-11-21
JPS5658632A	1981-05-21

Attorney, Agent or Firm:

Director, Electronic Technology Research Institute, AIST

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