Title:
ガス処理装置
Document Type and Number:
Japanese Patent JP7100894
Kind Code:
B2
Abstract:
To provide a gas processing device with which it is possible to measure a pressure at a distance while using an analog pressure gauge.SOLUTION: A processing device is equipped with a gas box for accommodating a plurality of flow control apparatuses and is constituted including: an analog pressure gauge for detecting a pressure of gas flowing in a flow control apparatus; a top panel constituting a portion of the gas box and having formed therein a window part through which the indication part of the pressure gauge is visible; an imaging device installed at a reverse side of the top panel, for imaging the indication part of the pressure gauge; and a light installed at the reverse side of the top panel, for illuminating an imaging range of an imaging device.SELECTED DRAWING: Figure 10
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Inventors:
Atsushi Yokota
Yuta Toyota
Toshiyuki Inada
Yuta Toyota
Toshiyuki Inada
Application Number:
JP2018244003A
Publication Date:
July 14, 2022
Filing Date:
December 27, 2018
Export Citation:
Assignee:
Fujikin Co., Ltd.
International Classes:
G01L19/08; G05D7/06; G05D16/20; H01L21/02
Domestic Patent References:
| JP5478666B2 | ||||
| JP2013228286A | ||||
| JP518841A | ||||
| JP3232160U |
Foreign References:
| CN205449190U |
Attorney, Agent or Firm:
Patent business corporation ken intellectual property general office
Kenji Fujimoto
Kenji Fujimoto
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