Title:
ガス製造設備、ガス供給容器、及び電子装置製造用ガス
Document Type and Number:
Japanese Patent JPWO2005088185
Kind Code:
A
Inventors:
Masahiro Nakamura
Kato 丈佳
Tadahiro Omi
Katsutomo Tanaka
Kimiaki Tanaka
Yasuyuki Shirai
Kato 丈佳
Tadahiro Omi
Katsutomo Tanaka
Kimiaki Tanaka
Yasuyuki Shirai
Application Number:
JP2005002329W
Publication Date:
September 22, 2005
Filing Date:
February 16, 2005
Export Citation:
Assignee:
Tadahiro Omi
Nippon Zeon Co., Ltd.
Nippon Zeon Co., Ltd.
International Classes:
C07C25/13; C23C8/18; C23C8/14; C07C23/08; C07C21/185; F17C1/10; C07C23/06; C07C21/18; C23C16/30; C07C21/22; C23C4/10; C07C17/38
Attorney, Agent or Firm:
Kosuke Yamamoto
Noriyasu Ikeda
Shuichi Fukuda
Noriyasu Ikeda
Shuichi Fukuda
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