PURPOSE: To obtain a sensitive element with a high massproducibility, by arranging a sensitive film, a counter electrode and a heater section to enable the heating of the sensitive film efficiently at a low power.
CONSTITUTION: A ceramic substrate 1 is heated up 200W600°C with the energization of a heater. Under such a condition, when a gas such as CO exists, it get in contact with the surface of a gas sensitive film 10 to cause a chemical reaction such as adsorbing reaction, lowering the resistance value of the sensitive film 10. This variation value is checked with lead pins 24 and 25 through electrode terminals 11 and 12 from a electrodes 8 and 9 detect the density of the gas. In this manner, as portions having the sensitive film 10, the electrodes 8 and 9 and the heater is surrounded by holes 6 and 7, heat of the heater is not radiated through the whole of the substrate 1. Thus, a sensitive element can be obtained with a high massproducibility having the lead pins 24 and 25 and the substrate 1 connectable by soldering at a relatively low temperature.
UEDA KAZUMITSU
KAJIWARA JUNJI
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