PURPOSE: To perform heating efficiently and evenly and to make the life of a heating body long, by holding an insulating substrate on which a gas sensitive body and a heating body are provided, by heat resisting inorganic paper, and mounting the substrate on a base plate.
CONSTITUTION: On an insulating substrate 1 comprising Al2O3 and the like, a gas sensitive body (SnO2 series and the like) comprising a semiconductor is formed. A heating body 3 is provided on the back surface of the substrate. Electrodes 2' and 3' are formed on the gas sensitive body 2 and the heating body 3, and leads 2" and 3" are provided. The substrate 1, which is held by inorganic paper comprising inorganic fiber such as quartz, aluminosilicate, and the like, is mounted on a base plate 5. Since the inorganic paper has excellent heat insulating property and is not contacted with the base plate 5, heating is preformed efficiently and evenly, and the life of the heating body 3 can be made long.
TAKIGAWA OSAMU
SHIRATORI MASAYUKI
SAKAI TADASHI
