Title:
GAS SENSOR DEVICE
Document Type and Number:
Japanese Patent JP2022012738
Kind Code:
A
Abstract:
To provide a gas sensor device which features high detection sensitivity and fast response and guarantees operation in harsh environments.SOLUTION: A gas sensor device is provided, comprising a substrate with a cavity structure, a gas sensor disposed in a recess of the cavity structure of the substrate, and a liquid-impermeable gas-permeable thin film bonded to the substrate to cover the recess.SELECTED DRAWING: Figure 1
Inventors:
ITOI SEIICHI
SUZUKI SHINYA
SUZUKI SHINYA
Application Number:
JP2020114785A
Publication Date:
January 17, 2022
Filing Date:
July 02, 2020
Export Citation:
Assignee:
PANASONIC IP MAN CORP
International Classes:
G01N27/12; G01N27/04; G01N27/18
Attorney, Agent or Firm:
Washeda International Patent Office