Title:
気体センサ装置
Document Type and Number:
Japanese Patent JP6802703
Kind Code:
B2
Abstract:
An object of the present invention is to provide a gas sensor device capable of detecting a temporal change with high accuracy and maintaining measurement accuracy over a long period under a temperature environment susceptible to a complicated and wide range of change.The gas sensor device includes: heat insulating films 8a and 8b formed on a substrate 2; a first heater 3 provided on the heat insulating films 8a and 8b and configured to measure physical quantity of gas; and a reference resistor 4 formed in a resistive layer same as the first heater and formed on the heat insulating films 8a and 8b. The gas sensor device further includes a second heater 5 that simultaneously heats the first heater 3 and the reference resistor 4.
Inventors:
Hiroshi Nakano
Masahiro Matsumoto
Yasuo Onose
Hiroaki Hoshika
Masahiro Matsumoto
Yasuo Onose
Hiroaki Hoshika
Application Number:
JP2016242217A
Publication Date:
December 16, 2020
Filing Date:
December 14, 2016
Export Citation:
Assignee:
Hitachi Automotive Systems, Ltd.
International Classes:
G01N25/62; G01F1/692; G01N25/18; G01N27/18
Domestic Patent References:
| JP2006234576A | ||||
| JP2011137679A | ||||
| JP2015227821A |
Attorney, Agent or Firm:
Polaire Patent Business Corporation