Title:
GAS STORAGE AND MEASURE DISTRIBUTION SYSTEM FOR MONOLITH CARBON ABSORBER
Document Type and Number:
Japanese Patent JP2016052655
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a fluid storage and measurement distribution device containing a vessel where internal volume contains physical absorber adsorbing and holding a fluid as the fluid storage and measurement distribution device having internal volume and fluid for measurement and distribution from the vessel is detachable from the absorber, and a measurement distribution assemble bound to the vessel for measuring and distributing detached fluid from the vessel.SOLUTION: A physical absorber contains a monolith carbonaceous physical absorber, the monolith carbonaceous physical absorber has at least one of properties that (a) pack density measured at 25°C and pressure of 650 Torr regarding arsine gas is higher than arsine 400 g/absorber 1 L, (b) at least 30% of whole porosity of the absorber contains pores with a slit shape and a size in a range of about 0.3 to about 0.72 nm and at least 20% of whole porosity of the absorber contains micropores having diameter of less than 2 nm, (c) it is formed by thermal decomposition and optionally activation at a temperature of less than 1,000°C and has bulk density of about 0.80 to about 2.0 g/cm.SELECTED DRAWING: None
Inventors:
J DONALD CARRUTHERS
Application Number:
JP2015206726A
Publication Date:
April 14, 2016
Filing Date:
October 20, 2015
Export Citation:
Assignee:
ENTEGRIS INC
International Classes:
B01J20/20; B01D53/04; B01J4/02; B01J20/28; B01J20/30; C01B32/336; F17C11/00
Domestic Patent References:
JP2000500842A | 2000-01-25 | |||
JPH11511233A | 1999-09-28 | |||
JPH10180092A | 1998-07-07 | |||
JPH0775734A | 1995-03-20 | |||
JPH08504394A | 1996-05-14 | |||
JP2001287905A | 2001-10-16 | |||
JPH1182891A | 1999-03-26 | |||
JPS60150831A | 1985-08-08 |
Foreign References:
WO2001093985A1 | 2001-12-13 | |||
US6090477A | 2000-07-18 | |||
WO1999041010A1 | 1999-08-19 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito