Title:
Gas stream processing unit
Document Type and Number:
Japanese Patent JP6132405
Kind Code:
B2
Abstract:
In an apparatus for treating a gas stream, a plasma generator comprises an electrode for energizing a source gas to generate a plasma flare by application of a high voltage. An inlet allows the gas stream into the apparatus and directs it into the generated plasma. A scraper is fitted for reciprocating movement from a first position to a second position for scraping a surface to remove solid deposits accumulated on the surface.
Inventors:
Clements Christopher James Philip
Voronin Sergey Alexandrovich
Bidder John Leslie
Mcgrath daniel
Voronin Sergey Alexandrovich
Bidder John Leslie
Mcgrath daniel
Application Number:
JP2014525484A
Publication Date:
May 24, 2017
Filing Date:
July 11, 2012
Export Citation:
Assignee:
Edwards Limited
International Classes:
C23C16/44; B01D53/46; B01D53/56; B01D53/58; B01D53/66; B01D53/72; B01J19/08; B08B1/00; H01L21/205; H01L21/31; H05H1/26; H05H1/34
Domestic Patent References:
| JP2008093442A1 | ||||
| JP2011038666A | ||||
| JP2007263554A | ||||
| JP2003299942A | ||||
| JP60128266A |
Foreign References:
| US20090274592 |
Attorney, Agent or Firm:
Shinichiro Tanaka
Disciple Maru Ken
Mitsuru Matsushita
Ichiro Kurasawa
Yasushi Yamamoto
Yamamoto Kousuke
Disciple Maru Ken
Mitsuru Matsushita
Ichiro Kurasawa
Yasushi Yamamoto
Yamamoto Kousuke