To provide a gas supply accumulating unit having a reduced size.
The gas supply accumulating unit 1 is provided on a supply gas transport duct with a mass flow controller 4 and other fluid control equipment for controlling the supply or shut-off of supply gas. It comprises a flow path block 6A arranged between the lower parts of the fluid control equipment 3 and the mass flow controller 4, which has a supply gas input port 24 for inputting the supply gas, a purge gas input port 25 for inputting purge gas and a common output port 26 for outputting the supply gas or the purge gas provided with their openings in the upper face, which has a mounting opening portion 21 for a purge valve 3 to be mounted therein provided with its opening in the side face, and which is communicated with the supply gas input port 24, the purge gas input port 25 and the common output port 26.
DOI HIROKI
NAGAOKA HIDEKI
MORIYA SHUJI
OKABE YASUYUKI
TOKYO ELECTRON LTD
| JPH0916267A | 1997-01-17 | |||
| JPH09303308A | 1997-11-25 | |||
| JPH05203100A | 1993-08-10 | |||
| JPH0678690U | 1994-11-04 | |||
| JP2001503840A | 2001-03-21 |