Title:
GAS SUPPLY CUTOFF VALVE
Document Type and Number:
Japanese Patent JPH08105552
Kind Code:
A
Abstract:
PURPOSE: To provide a gas supply cutoff valve which can cut off a gas stably even when granuar substances are included in the gas.
CONSTITUTION: A gas supply cutoff means provided in a valve housing includes a stationary valve seat member 92 and a movable valve member 94. To one side of the valve seat member 92 and the valve member 94, an upstream side circular seal 98 and a downstream side circular seal 100 are formed. Between the upstream side circular seal 98 and the downstream side circular seal 100, a gas injection means 110 to inject a gas into the valve housing 2 is provided.
Inventors:
ABE KEIJI
IIYAMA SHOJI
IIYAMA SHOJI
Application Number:
JP19838494A
Publication Date:
April 23, 1996
Filing Date:
August 23, 1994
Export Citation:
Assignee:
TOKUYAMA CORP
International Classes:
F16K51/00; F16K1/20; F16K1/36; F16K1/42; F16K3/314; H01L21/02; (IPC1-7): F16K3/314; F16K51/00; H01L21/02
Attorney, Agent or Firm:
Naozumi Ono