Title:
流量測定可能なガス供給装置、流量計、及び流量測定方法
Document Type and Number:
Japanese Patent JP6650166
Kind Code:
B2
Abstract:
A gas supply system capable of flow measurement includes a flow controller that controls the flow rate of a flowing gas, a first shutoff valve provided downstream of the flow controller, a second shutoff valve provided in a first flow passage communicating with the downstream side of the first shutoff valve, a second flow passage that branches from the first flow passage, a third shutoff valve provided in the second flow passage, a pressure sensing device that detects a pressure in a flow passage controlled by the first, second, and third shutoff valves, a temperature sensing device that detects a temperature in the flow passage controlled by the first, second, and third shutoff valves, a volume measuring tank connected downstream of the third shutoff valve and having a known volume, and an arithmetic and control unit that obtains a passage volume controlled by the first, second, and third shutoff valves by applying Boyle's law to open and closed states of the third shutoff valve and calculates the flow rate of the flow controller, using the passage volume and detection values obtained by the pressure sensing device and the temperature sensing device.
Inventors:
Yohei Sawada
Shinichi Ikeda
Koji Nishino
Masaaki Nagase
Shinichi Ikeda
Koji Nishino
Masaaki Nagase
Application Number:
JP2017561152A
Publication Date:
February 19, 2020
Filing Date:
January 12, 2017
Export Citation:
Assignee:
Fujikin Co., Ltd.
International Classes:
G01F25/00; G01F17/00
Domestic Patent References:
| JP5090448B2 | ||||
| JP4801726B2 | ||||
| JP5222935B2 | ||||
| JP5512517B2 | ||||
| JP5538119B2 | ||||
| JP5688026B2 | ||||
| JP5346628B2 | ||||
| JP5703032B2 | ||||
| JP6047540B2 | ||||
| JP4648098B2 | ||||
| JP4866682B2 |
Foreign References:
| CN101498600A |
Attorney, Agent or Firm:
Yata Ryuichi
Takeshi Sugimoto
Takeshi Sugimoto