Title:
ガス供給システム及びガス供給方法
Document Type and Number:
Japanese Patent JP5792776
Kind Code:
B2
Abstract:
A method of and system for recirculating a fluid in a particle production system. A reactor produces a reactive particle-gas mixture. A quench chamber mixes a conditioning fluid with the reactive particle-gas mixture, producing a cooled particle-gas mixture that comprises a plurality of precursor material particles and an output fluid. A filter element filters the output fluid, producing a filtered output. A temperature control module controls the temperature of the filtered output, producing a temperature-controlled, filtered output. A content ratio control module modulates the content of the temperature-controlled, filtered output, thereby producing a content-controlled, temperature-controlled, filtered output. A channeling element supplies the content-controlled, temperature-controlled, filtered output to the quench chamber, wherein the content-controlled, filtered output is provided to the quench chamber as the conditioning fluid to be used in cooling the reactive particle-gas mixture.
Inventors:
Rayman, Frederick, Pee.
Application Number:
JP2013168600A
Publication Date:
October 14, 2015
Filing Date:
August 14, 2013
Export Citation:
Assignee:
SDC Materials, Inc.
International Classes:
B01J4/00; B01J7/02; B01J19/08; F17C7/04
Domestic Patent References:
| JP49031571A | ||||
| JP2006339A | ||||
| JP2034707A | ||||
| JP3226509A | ||||
| JP5193909A | ||||
| JP6172820A | ||||
| JP9141087A | ||||
| JP2007138287A |
Attorney, Agent or Firm:
Akira Koike
Seiji Iga
Toshiya Fujii
Seiji Iga
Toshiya Fujii