Title:
ガス流量検定ユニット付ガス供給ユニット
Document Type and Number:
Japanese Patent JP4801726
Kind Code:
B2
Abstract:
A gas flow rate verification unit capable of enhancing reliability of gas flow rate verification. The gas flow rate verification unit has a first cutoff valve that is connected to a flow rate control device and to which gas is inputted, a second cutoff valve for discharging the gas, a communication member for allowing the first cutoff valve and the second cutoff valve to communicate with each other, a pressure sensor for detecting the pressure of the gas supplied between the first cutoff valve and the second cutoff valve, a temperature detector for detecting the temperature of the gas supplied between the first cutoff valve and the second cutoff valve, and a control means for verifying the flow of the gas flowing in the flow control device, the verification being performed by using both the result of the pressure detected by the pressure sensor and the result of the temperatures detected by the temperature detector. The volume (Vk) between the valve seat of the first cutoff valve and the valve seat of the second cutoff valve is equal to or less than the volume (Ve) between the outlet of the flow control device and the valve seat of the first cutoff valve.
Inventors:
Yukio Ozawa
Minoru Ito
Hiroki Doi
Akiko Nakata
Minoru Ito
Hiroki Doi
Akiko Nakata
Application Number:
JP2008503774A
Publication Date:
October 26, 2011
Filing Date:
February 22, 2007
Export Citation:
Assignee:
CKD Corporation
International Classes:
G01F25/00
Domestic Patent References:
| JPS5920814A | 1984-02-02 | |||
| JPH11502026A | 1999-02-16 | |||
| JPH06160152A | 1994-06-07 | |||
| JPH0322931A | 1991-01-31 |
Attorney, Agent or Firm:
Patent Business Corporation Cosmos Patent Office