Title:
GAS SUPPLYING DEVICE FOR MULTI-STAGE VACUUM PUMP
Document Type and Number:
Japanese Patent JPH05118286
Kind Code:
A
Abstract:
PURPOSE: To dispense with installation of a needle valve by supplying gas from a downstream past of each orifice to a plurality of chambers wherein the orifices are connected to each other in multiple stages in series and pressure is sequentially decreased.
CONSTITUTION: In a gas supplying device of a multiple stage vacuum pump for supplying gas to a plurality of chambers S1, S2, S3, ... Sn, where pressure is sequentially decreased, orifices O1, O2, O3. ... On, are connected to each other in multiple stages in series and gas is supplied from a downstream part of each orifice O1, O2, O3, ... On, to the respective chambers S1, S2, S3, ... Sn.
Inventors:
WATANABE YASUHIRO
OGAMINO HIROAKI
MURAKAMI SEIGO
USUI KATSUAKI
OGAMINO HIROAKI
MURAKAMI SEIGO
USUI KATSUAKI
Application Number:
JP25468191A
Publication Date:
May 14, 1993
Filing Date:
September 05, 1991
Export Citation:
Assignee:
EBARA CORP
International Classes:
F04C18/18; F04C23/00; F04C25/02; F04C28/02; F04C29/00; F04C29/12; (IPC1-7): F04C18/18; F04C23/00; F04C25/02; F04C29/00
Attorney, Agent or Firm:
Isamu Watanabe (1 person outside)
Previous Patent: JPS5118285
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