PURPOSE: To provide a gas trap provided with stabilized exhaust function for the stable operation for a long period of time by removing mechanically a solid component collected in a gas flow path.
CONSTITUTION: Gas exhausted from a reaction chamber is flowed from an inflow opening 4 of a gas trap, passing through a space formed around a helical blade 9, and exhausted out of an exhaust outlet 5. At that time, a wall 10 of a main body 1 is cooled by a water-cooling jacket 6, and a component to be solidified by the temperature in the gas is made to adhere to the inner face of the wall 10. An adhered material is scraped off to the lower face side of the blade 9 by rotating a rotating shaft 8 and stored in a solid storage chamber 2. Thus stabilized exhaust without the accumulation of solids in an exhaust flow path is carried out, and no backflow of solids is generated to prevent generation of troubles such as a bite and others in a vacuum pump.
SUGIURA TETSUO
HATTORI HIROSHI
HANABUSA NAOYA
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