Title:
GASEOUS PHASE PEACTOR
Document Type and Number:
Japanese Patent JP52089582
Kind Code:
A
Abstract:
PURPOSE: To provide a high frequency heating structure suitable for a gaseous phase reactor especially used in semiconductor industry by means of setting a wall consisting of specific inner wall, insulation layer and cooling means.
Inventors:
Nakamura, Junichi
Yoshida, Akimitsu
Yoshida, Akimitsu
Application Number:
JP1976000006762
Publication Date:
July 27, 1977
Filing Date:
January 23, 1976
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
C30B25/10; B01J12/00; C23C16/46; H01L21/205; (IPC1-7): B01J1/14; B01J17/32; H01L21/20