Title:
GATE VALVE AND CHAMBER
Document Type and Number:
Japanese Patent JP2014234917
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a gate valve capable of remarkably reducing particles and a discharge gas generated in operating the gate valve, and a chamber including the same.SOLUTION: A gate valve 1 opens and closes an opening portion 7 by operating a seal unit 4 by a linear actuator 10 incorporated between a seal plate 8 and a back plate 9. When a buffer member 17 disposed at an upper portion of the back plate 9 is joined with an upper stopper 14 disposed on the chamber 6 by receiving reaction force in pressing the seal plate 8 to a seal face 12, a valve rod 2 connected to the back plate 9 is elastically deformed into the bow shape, thus a surface pressure and impact force in joining can be reduced.
Inventors:
SAITO TATSUO
KUROSAKI HIROYUKI
KUROSAKI HIROYUKI
Application Number:
JP2013118639A
Publication Date:
December 15, 2014
Filing Date:
June 05, 2013
Export Citation:
Assignee:
IRIE KOKEN KK
International Classes:
F16K3/18; F16K51/02
Domestic Patent References:
| JP2001355745A | 2001-12-26 | |||
| JP2011505528A | 2011-02-24 | |||
| JP2004197841A | 2004-07-15 | |||
| JP2005163964A | 2005-06-23 | |||
| JPH0599348A | 1993-04-20 |
Attorney, Agent or Firm:
Yuji Kayahara