To provide a gate valve and a vacuum gate valve which prevent the adhesion of foreign matter onto a seal surface and the occurrence of leakage.
A vacuum gate valve 2 for opening/closing opposing seal surfaces 13a, 14a provided to a process chamber side discharge port 13 and a pump side discharge port 14 is equipped with an opening valve element 28 for abutting to the seal surfaces 13a, 14a and communicating between the process chamber side discharge port 13 and the pump side discharge port 14 when opening the valve, a closing valve element 31 for abutting to the seal surfaces 13a, 14a and cutting off the process chamber side discharge port 13 and the pump side discharge port 14 when closing the valve, a valve casing 11 for accommodating the opening valve element 28 and the closing valve element 31, and a handle 22 for exchangeably moving the opening valve element 28 and the closing valve element 31 with respect to the seal surfaces 13a, 14a in the valve casing 11.
HAGA MASAYUKI
Tadahiro Mitsuishi
Yasuyuki Tanaka
Hiroshi Matsumoto
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