Title:
GATE VALVE
Document Type and Number:
Japanese Patent JP2019183996
Kind Code:
A
Abstract:
To provide a gate valve with a heater which enables uniform heating of the gate valve and easy replacement of the heater.SOLUTION: A gate valve includes: a valve body for opening/closing an opening of a vacuum chamber; a heater which uniformly transmits heat to the valve body; and a shaft body which movably holds the valve body and houses the heater. The heater is detachably attached to the shaft body from the atmospheric pressure side without being exposed to the vacuum side where the valve body is disposed.SELECTED DRAWING: Figure 1
Inventors:
KUROSAWA KAZUO
UMEHARA HIDEKI
SATO TAKAYUKI
TSUCHIDA YOSHIKI
UMEHARA HIDEKI
SATO TAKAYUKI
TSUCHIDA YOSHIKI
Application Number:
JP2018077282A
Publication Date:
October 24, 2019
Filing Date:
April 13, 2018
Export Citation:
Assignee:
V TEX KK
International Classes:
F16K49/00; F16K51/02
Domestic Patent References:
| JPH11325315A | 1999-11-26 | |||
| JP2001173838A | 2001-06-29 | |||
| JP5664846B2 | 2015-02-04 | |||
| JP2017026128A | 2017-02-02 | |||
| JP2006170373A | 2006-06-29 | |||
| JPH0640530U | 1994-05-31 | |||
| JPS6037139A | 1985-02-26 | |||
| JPH06338469A | 1994-12-06 | |||
| JPH0349468U | 1991-05-14 | |||
| JPS58186276U | 1983-12-10 | |||
| JP2013171941A | 2013-09-02 | |||
| JPH08285132A | 1996-11-01 |
Foreign References:
| US5915410A | 1999-06-29 |
Attorney, Agent or Firm:
Nichimine International Patent Office