To simplify manufacturing processes and manufacture a getter cheaply and safely by hydrogenating zirconium or titanium having a specified purity, and smashing it, and furthermore, forming finely smashed powder, in an non- evaporated getter used for vacuum holding and the like.
Zirconium or titanium having 90% or more of the purity is hydrogenated and smashed, and thereby, a getter is formed. In this time, hydrogen of 10,000 ppm or more contains. After that, it may be dehydrogenated. In this time, hydrogen of 100 ppm or more contains. The purities of the zirconium and the titanium are set to 99%. In the case of manufacture, it is hydrogenated and smashed, and furthermore fine smashed powder is formed. It is thus possible to simplify manufacturing processes, and an non-evaporated getter is manufactured cheaply and safely.
JPS5942990 | [Title of the device] Electric A pot |
HAIDA HIROSHI
Next Patent: GAS TRANSFER MACHINE