To provide a glass master, and a manufacturing method for the glass master in which a manufacturing process is simplified, and a protruding part can be formed without using a lower layer, and to provide an optical disk substrate, and a manufacturing method for the optical disk substrate thereof.
In the manufacturing method for the glass master in which, after applying a photoresist 2 on a glass substrate 1, exposure and development are performed by laser beam irradiation, and a photo rest pattern 7 having the protruding parts at both ends is formed and produced, the photoresist 2 has a thickness of 20-200 nm, a glass transition point temperature of 60-150°C, and a B value of 4.0 μm-1-6.5 μm-1 at a exposure wavelength of 200-300 nm, and the wavelength of the laser beam is 200-300 nm.
WO/1999/040579 | SUBSTRATE DISK |
JPH06180865 | PRODUCTION OF MASTER PLATE |
JP2004047018 | DISK TRANSFER DEVICE AND OPTICAL DISK MANUFACTURE DEVICE PROVIDED WITH IT |