GLASS SUBSTRATE SMOOTHING DEVICE - Matsushita Electric Industrial Co., Ltd

Title:

GLASS SUBSTRATE SMOOTHING DEVICE

Document Type and Number:

Japanese Patent JP3726405

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide a glass substrate smoothing device capable of flattening a substrate efficiently by uniformly grinding the entire surfaces of a glass substrate having coat film such as color filter substrate and locally raising the grinding level for those protruded parts caused by waviness or foreign matter.
SOLUTION: A glass substrate smoothing device comprises a grinding means 2 which grinds the surfaces of a glass substrate 1, a flexible stage 9 which fixedly supports the glass substrate 1, and a push up means 10 which partially push up the glass substrate 10 from the underside. Also the necessary protruded and nonuniformly coated parts in the glass substrate 1 located on the flexible stage 9 are raised from the underside so as to enable to selectively vary grinding level and sufficiently smoothen the parts in a specified processing time.

Inventors:

Yasuo Kidouchi

Application Number:

JP6553297A

Publication Date:

December 14, 2005

Filing Date:

March 03, 1997

Export Citation:

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