Title:
ガラス基板搬送装置及びガラス基板搬送方法
Document Type and Number:
Japanese Patent JP5370776
Kind Code:
B2
Inventors:
Hikaru Tomita
Takeo Yata
Kazuyuki Amayama
Noriaki Orita
Takeo Yata
Kazuyuki Amayama
Noriaki Orita
Application Number:
JP2010057362A
Publication Date:
December 18, 2013
Filing Date:
March 15, 2010
Export Citation:
Assignee:
Nippon Electric Glass Co., Ltd.
International Classes:
B65G49/06; H01L21/677
Domestic Patent References:
| JP60213441A | ||||
| JP2005162604A | ||||
| JP2000039013A | ||||
| JP59111935A |
Attorney, Agent or Firm:
Hideka Tanaka
Kunihiko Shiromura
Tsuyoshi Kumano
Kunihiko Shiromura
Tsuyoshi Kumano