Title:
GLOW DISCHARGE EMISSION SPECTRAL ANALYSIS METHOD AND ITS APPARATUS
Document Type and Number:
Japanese Patent JP3569716
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a glow discharge emission spectral analysis method and its apparatus, capable of shortening a matching follow-up time and capable of executing accurately analysis of the periphery of a sample surface.
SOLUTION: After a discharge part evacuated, a high-frequency voltage is applied to the discharge part between an anode pipe and a sample through a matching circuit 14. A circuit constant is set up so that the matching circuit 14 will fulfill matching conditions, and afterwards, the supply of the high-frequency voltage is stopped. Then, after supplying analytical gas to the discharge part, the high-frequency voltage is applied to the interval between the anode and the sample via the matching circuit 14, to thereby generate glow discharge, and the sample is sputtered and simultaneously generated light is analyzed.
Inventors:
Fumio Hiramoto
Application Number:
JP19136598A
Publication Date:
September 29, 2004
Filing Date:
July 07, 1998
Export Citation:
Assignee:
Rigaku Denki Kogyo Co., Ltd.
International Classes:
G01N21/67; (IPC1-7): G01N21/67
Domestic Patent References:
| JP8075653A | ||||
| JP11326214A |
Attorney, Agent or Firm:
Shuji Sugimoto
Masashi Noda
Masashi Noda