Title:
物品収容装置
Document Type and Number:
Japanese Patent JP7384132
Kind Code:
B2
Abstract:
To prevent deterioration of an article in a storage container even when a take-out space is formed in the storage container.SOLUTION: An article storage device 30 includes a storage container 5 having a plurality of supports 7 and forming a gas-fillable portion 5g by stacking these supports 7 in the vertical direction, an opening/closing device 60 that separates a support 7 of a plurality of stacked supports 7 constituting the storage container 5 from the upper support 7 in the vertical direction forms take-out spaces D1 and D2 for taking out a wafer W supported by one support 7, and a gas ejection device 70 that ejects inert gas toward the take-out spaces D1 and D2, and the gas ejection device 70 suppresses leakage from the gas-fillable portion 5g containing the inert gas to the outside of the storage container 5 through the take-out spaces D1 and D2 formed by the opening/closing device 60, or fills the inert gas in the gas-fillable portion 5g containing the inert gas through the take-out spaces D1 and D2.SELECTED DRAWING: Figure 1
Inventors:
Nobuyuki Ito
Application Number:
JP2020149025A
Publication Date:
November 21, 2023
Filing Date:
September 04, 2020
Export Citation:
Assignee:
Murata Machinery Co., Ltd.
International Classes:
H01L21/673; B65D85/30
Domestic Patent References:
| JP2009290102A | ||||
| JP201936761A | ||||
| JP2009540556A | ||||
| JP2009500256A |
Foreign References:
| WO2020005611A1 | ||||
| WO2019073823A1 |
Attorney, Agent or Firm:
Kazuya Nishi
Tomihiko Isono
Tomihiko Isono