Title:
リソグラフィック装置およびデバイス製造方法
Document Type and Number:
Japanese Patent JP4070751
Kind Code:
B2
Abstract:
A lithographic apparatus comprises a controller having a series connection of at least two integrators and an integrator output circuit for deriving an output quantity of the series connection of integrators. Further, the controller comprises an integrator saturator which is operatively coupled to the integrator output circuit and having an operating area for passing through the output quantity and a saturation area for saturating the output quantity. A saturation control mechanism for controlling saturation sets an output quantity of at least one of the series connected integrators to a neutral value, when the integrator saturator is in the saturation area, except when the output quantity of or an input quantity of at least one of the series connected integrators has a value such that it would tend to bring the integrator saturator from the saturation area to the operating area. In this manner, delay time for the controller, when in the saturation area, to get to the operating area, is reduced. At least one of the series connected integrators can comprise an amplification stage and an integrator stage connected to an output of the amplification stage, an amplification of the amplification stage being under control of a parameter change mechanism, thus a bumpless transfer can be achieved.
Inventors:
Robertus Johannes Marinus de Jong
Petrus marinus christianum maria van den big gerard
Thomas Augustus Mattar
Johannes Theodorus Guillerimus Maria van de Haen
Petrus marinus christianum maria van den big gerard
Thomas Augustus Mattar
Johannes Theodorus Guillerimus Maria van de Haen
Application Number:
JP2004211324A
Publication Date:
April 02, 2008
Filing Date:
July 20, 2004
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
H01L21/027; G03F7/20; G05B11/42
Domestic Patent References:
| JP10144603A | ||||
| JP63285408A | ||||
| JP7020904A | ||||
| JP2001195102A | ||||
| JP11327603A | ||||
| JP2000036531A | ||||
| JP2226818A | ||||
| JP113122A | ||||
| JP5160735A | ||||
| JP9246972A | ||||
| JP5561804A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki
Shinji Oga
Toshifumi Onuki