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Title:
GRAPHITE HEATING FURNACE
Document Type and Number:
Japanese Patent JP2007205691
Kind Code:
A
Abstract:

To suppress generation of cyanogen gas with a simple structure even when nitrogen gas is filled in the whole of a furnace body.

This graphite heating furnace 100 is provided with: a nitrogen gas supply part 8 for supplying nitrogen gas into the furnace body 6; an exhaust part 9 for exhausting in-furnace-body gas in the furnace body 6 to the outside of the furnace body 6; and gaps 6a and 6b as discharge parts for discharging the in-furnace-body gas to the outside of the furnace body 6. The dew-point temperature of the nitrogen gas supplied into the furnace body 6 is below -80°C; and the pressure in the furnace body 6 is set above 140 Pa with respect to the atmospheric pressure outside the furnace body 6.

COPYRIGHT: (C)2007,JPO&INPIT


Inventors:
TAKAHASHI TADASHI
Application Number:
JP2006028326A
Publication Date:
August 16, 2007
Filing Date:
February 06, 2006
Export Citation:
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Assignee:
FURUKAWA ELECTRIC CO LTD
International Classes:
F27D11/02; C03B37/029; F27B17/00; F27D19/00; F27D21/00
Domestic Patent References:
JPS62149798U1987-09-22
JPH0610006A1994-01-18
JP2003212582A2003-07-30
JP2002173333A2002-06-21
JP2005225947A2005-08-25
JP2000143385A2000-05-23
JPS6360124A1988-03-16
Attorney, Agent or Firm:
Hiroaki Sakai