To suppress generation of cyanogen gas with a simple structure even when nitrogen gas is filled in the whole of a furnace body.
This graphite heating furnace 100 is provided with: a nitrogen gas supply part 8 for supplying nitrogen gas into the furnace body 6; an exhaust part 9 for exhausting in-furnace-body gas in the furnace body 6 to the outside of the furnace body 6; and gaps 6a and 6b as discharge parts for discharging the in-furnace-body gas to the outside of the furnace body 6. The dew-point temperature of the nitrogen gas supplied into the furnace body 6 is below -80°C; and the pressure in the furnace body 6 is set above 140 Pa with respect to the atmospheric pressure outside the furnace body 6.
COPYRIGHT: (C)2007,JPO&INPIT
JPS62149798U | 1987-09-22 | |||
JPH0610006A | 1994-01-18 | |||
JP2003212582A | 2003-07-30 | |||
JP2002173333A | 2002-06-21 | |||
JP2005225947A | 2005-08-25 | |||
JP2000143385A | 2000-05-23 | |||
JPS6360124A | 1988-03-16 |
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