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Title:
GRAPHITE NANOFIBER AND METHOD OF MANUFACTURING THE SAME, GRAPHITE NANOFIBER ELECTRON SOURCE, AND FIELD EMISSION DISPLAY APPARATUS
Document Type and Number:
Japanese Patent JP2009146693
Kind Code:
A
Abstract:

To provide a method of manufacturing a graphite nanofiber, which can form graphite nanofibers in vertical orientation with high density and uniformly; to provide a graphite nanofiber electron source with a high output current density; and to provide a field emission display apparatus which has high current density, high brightness and large capacity.

The method includes the steps of: forming a cathode electrode 10 on a substrate 18; forming an insulating film 12 on the cathode electrode 10; forming a gate electrode 14 on the insulating film 12; forming a hole 11 communicating with a surface of the cathode electrode 10 in the insulating film 12; forming a catalyst metal layer 28 on a bottom face of the hole 11; and forming the graphite nanofiber 4 in vertical orientation on the catalyst metal layer 28.


Inventors:
Kato, Tomohiro
Application Number:
JP2007000321996
Publication Date:
July 02, 2009
Filing Date:
December 13, 2007
Export Citation:
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Assignee:
ROHM CO LTD
International Classes:
H01J9/02; H01J1/304; H01J29/04; H01J31/12; H01J9/02; H01J1/30; H01J29/04; H01J31/12